1: \begin{abstract}

2: The rigorous coupled-wave analysis (RCWA) is one of the most successful and widely used methods

3: for modeling periodic optical structures. It yields fast convergence of the electromagnetic

4: far-field and has been adapted to model various optical devices and wave configurations. In this

5: article, we investigate the accuracy with which the electromagnetic near-field can be calculated

6: by using RCWA and explain the observed slow convergence and numerical artifacts from which it

7: suffers, namely unphysical oscillations at material boundaries due to the Gibb's phenomenon. In

8: order to alleviate these shortcomings, we also introduce a mathematical formulation for accurate

9: near-field calculation in RCWA, for one- and two-dimensional straight and slanted diffraction

10: gratings. This accurate near-field computational approach is tested and evaluated for several

11: representative test-structures and configurations in order to illustrate the advantages provided

12: by the proposed modified formulation of the RCWA.

13: \end{abstract}

14: