1: \begin{abstract}

2: A method for automatic computation of parameter derivatives 

3: of numerically computed light scattering signals is demonstrated. 

4: The finite-element based method is validated in a numerical convergence study, and it 

5: is applied to investigate the sensitivity of a scatterometric setup 

6: with respect to geometrical parameters of the scattering target.  

7: The method can significantly improve numerical performance of design optimization, 

8: parameter reconstruction, sensitivity analysis, and other applications. 

9: \end{abstract}

10: