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3: %
4: \begin{document}
5: \title{The magnetized discharge with dust: negative and
6: positive space charge modes}
7:
8: \author{N F Cramer and S V Vladimirov}
9:
10: \address{School of Physics, The University of Sydney, N.S.W. 2006, Australia}
11:
12: \begin{abstract}
13: The structure of a discharge across a magnetic field in a dusty plasma is analysed. The dust macroparticles are %%@
14: negatively charged, but are unmagnetized because of their high mass. The electrons are highly magnetized, and the ions %%@
15: have intermediate magnetization. This results in different transport rates of the different species across the %%@
16: magnetic field. Depending on the size of the magnetic field, and the relative charge on the different species, the %%@
17: dust grains can be the dominant current carrier. The space charge clouds near the electrodes will then be determined %%@
18: by the relative mobility of the different species. The discharge can operate in one of two modes, a positive space %%@
19: charge (PSC) mode, characterized by a strong cathode fall, and a negative space charge (NSC) mode, characterized by a %%@
20: broad anode fall.
21: Features unique to the dust particles can also play a role in the structure of the discharge, such as the variable %%@
22: equilibrium charge on the grains, dependent on the local potential and species temperatures, the effect of gravity on %%@
23: the grain dynamics, and the rate of charging of the grains. The dust grains can also form an ordered structure, the %%@
24: dust-plasma crystal.
25: A fluid model of the different species is used to calculate the structure of the resulting discharge, incorporating %%@
26: the above effects. The transition from the PSC mode to the NSC mode as the magnetic field, pressure and dust %%@
27: properties are varied is demonstrated.
28:
29: \end{abstract}
30:
31: %
32: % Uncomment out if preprint format required
33: %
34: \pacs{52.80.Sm, 85.10.Jz}
35: \maketitle
36:
37: \section{Introduction}
38:
39: A Particle-in-Cell/Monte-Carlo (PIC/MC) simulation (van der Straaten et al.
40: 1994, 1997) and semi-analytic treatment (Cramer, 1997) of the radial structure of a low pressure DC cylindrical %%@
41: magnetron
42: discharge has revealed a potential and electric field structure highly dependent on the pressure
43: and magnetic field. As either the pressure was reduced or the magnetic field
44: was increased, the steady state discharge was found to exhibit a transition from a positive space charge mode (PSC), %%@
45: characterised by a strong cathode fall as occurs
46: in an unmagnetised glow discharge, to a negative space charge mode (NSC)
47: characterised by a broad anode fall. The reason for the transition to the
48: NSC mode is the strongly reduced (according to classical theory) transport of electrons across the
49: magnetic field in a low pressure, strongly magnetised plasma. These two modes of the magnetised discharge have
50: been discussed by Thornton and Penfold (1978).
51:
52: There is little conclusive experimental evidence for the NSC mode. The cathode fall is
53: always observed in planar magnetron experiments, even at very low pressures
54: (Rossnagel and Kaufmann 1986, Gu and Lieberman 1988). Experiments by Yeom et al.
55: (1989) with a cylindrical magnetron with pressures and magnetic fields similar to
56: those considered in this paper and in the PIC simulation study (van der Straaten et al.
57: 1997) showed a distinct cathode fall and no anode fall over the entire range of
58: discharge parameters. Langmuir probe measurements in a cylindrical magnetron
59: were also reported by van der Straaten et al. (1997) with the same discharge
60: parameters as used in the simulation, but the results did not agree with the
61: simulation results in that no anode fall was observed at low pressures and high
62: magnetic fields. However, Hayakawa and Wasa (1965) reported the existence of
63: a stable discharge operating in what appeared to be the NSC mode. The discharge featured a broad anode fall for a %%@
64: magnetic field strength greater than 4kG, which is considerably higher than the field strength predicted by the fluid %%@
65: model and the simulations ($\approx 100$kG) for the onset of the NSC mode.
66: In order to explain the persistence of the cathode fall in the experimental results it would be necessary for the %%@
67: electron transport across the magnetic field, at low pressures and high magnetic field strengths, to be considerably %%@
68: higher than is predicted by the classical transport coefficients. It has been postulated (eg Sheridan and Goree 1989) %%@
69: that turbulence or nonlinear coherent modes induced by instabilities in the partially ionized
70: plasma in crossed electric and magnetic fields (Simon 1963) may increase the
71: diffusion and drift of electrons, thus increasing their effective transport
72: coefficients.
73:
74: Dust macroparticles in a discharge are negatively charged, but are unmagnetized because of their high mass. The %%@
75: electrons are highly magnetized, and the ions have intermediate magnetization. This results in different transport %%@
76: rates of the different species across the magnetic field. Depending on the size of the magnetic field, and the %%@
77: relative charge on the different species, the dust grains can be the dominant current carrier. The space charge clouds %%@
78: near the electrodes will then be determined by the relative mobility of the different species. The two modes of the %%@
79: discharge will then be affected by the charge on, and the current carried by the dust grains.
80: Features unique to the dust particles can also play a role in the structure of the discharge, such as the variable %%@
81: equilibrium charge on the grains, dependent on the local potential and species temperatures, the effect of gravity on %%@
82: the grain dynamics, and the rate of charging of the grains. The dust grains can also form an ordered structure, the %%@
83: dust-plasma crystal.
84: A fluid model of the different species is used to calculate the structure of the resulting discharge, incorporating %%@
85: the above effects. The transition from the PSC mode to the NSC mode as the magnetic field, pressure and dust %%@
86: properties are varied is demonstrated.
87:
88: \section{The basic equations}
89: We consider a one-dimensional model of a magnetron discharge between
90: two parallel plate electrodes, as shown in Figure 1.
91:
92: \begin{figure}
93: \includegraphics[width=9cm]{Fig1.eps}
94: \caption{The discharge geometry.}
95: \end{figure}
96:
97: We assume a one-dimensional steady state distribution so that all quantities
98: are a function only of the distance $x$ from the cathode surface. The magnetic
99: field $\bf B$ is uniform and directed parallel to the cathode surface. The ions and dust grains are assumed
100: to be unaffected by the magnetic field, i.e. the ion and dust Larmor radii are assumed to be
101: much larger than the distance $d$ between the anode and the cathode.
102:
103: The electrons have two components of drift velocity, $v_{Te}$ transverse to the
104: magnetic field in the $x$-direction, and $v_{\perp e}$ perpendicular to both the electric field $\bf E$ and to $\bf %%@
105: B$,
106: where
107:
108: \begin{equation}
109: \label{vdrift}
110: v_{Te} =-\frac{e}{m} E \frac{\nu}{\nu^2 + \omega_c^2} ~~~~{\rm and}~~~~~
111: v_{\perp e} =-\frac{e}{m} E \frac{\omega_c}{\nu^2 + \omega_c^2}
112: \end{equation}
113: where $E$ is the $x$-component of $\bf E$ (negative in this case), $\omega_c$ is the electron-cyclotron frequency and %%@
114: $\nu$ is the collision
115: frequency of electrons with background gas atoms.
116: The resultant drift of the electrons is at an angle $\theta$ to the $x$-axis given by
117: \begin{equation}
118: \tan\theta = \omega_c /\nu .
119: \end{equation}
120: The basic equations used are those of Davies and Evans (1980), modified to
121: include the magnetic field and the dust. Thus we use Poisson's equation in one dimension, i.e.
122:
123: \begin{equation}
124: \frac{d E}{d x} = \rho /\epsilon _0
125: \end{equation}
126: where $\rho$ is the net charge density and $\epsilon _0$ is the permittivity of
127: free space. This equation may be rewritten as
128: \begin{equation}
129: \frac{d E}{d x} =\frac{1}{\epsilon_0}(\frac{J_i}{v_i} +\frac{J_e}{v_{Te}}+\frac{J_d}{v_d}),
130: \end{equation}
131: where $v_i$ is the ion drift velocity in the $x$-direction (negative in
132: this case), $v_d$ is the dust grain drift velocity, and $J_i$, $J_e$ and $J_d$
133: are the ion, electron and dust current densities in the $x$-direction.
134:
135: The dust current density is
136: \begin{equation}
137: J_d=n_d v_d Q_d=n_{d0}v_{d0}Q_d
138: \end{equation}
139: where we assume a constant flux of dust particles, with initial density and velocity $n_{d0}$ and $v_{d0}$. The dust %%@
140: charge varies in the discharge due to the varying local potential.
141:
142: Writing the total current density as $J=J_i +J_e+J_d$, and assuming $|v_i|\ll |v_d|$, we have
143:
144: \begin{equation}
145: \label{poisson}
146: \frac{d E}{d x} =\frac{J}{\epsilon_0 v_i}\left[ 1-\left( 1+ %%@
147: |\frac{v_i}{v_{Te}}|\right)j_e\right]+\frac{n_dQ_d}{\epsilon_0}
148: \end{equation}
149: where $j_e$ is the fraction of the total current density due to electrons. A boundary
150: condition that can be applied is that the electron current at the cathode is due solely
151: to secondary emission of electrons caused by ion impact on the cathode. The
152: secondary emission coefficient $\gamma =j_e/j_i$ at the cathode is assumed known.
153:
154: The second basic equation we use is the electron charge conservation equation,
155: or ionization avalanche equation. The electrons drift through the background
156: neutral gas at the angle $\theta$ to the $x$-axis and ionize the neutral gas molecules, and electron avalanches are %%@
157: formed.
158: These avalanches are therefore also inclined at the angle $\theta$ to the $x$-axis.
159: If the coordinate along this direction is $\zeta$, the normalized electron
160: current density in this direction is $j_{\zeta e}$ and the electric field in this
161: direction is $E_\zeta$, and the ionization equation may
162: be written
163:
164: \begin{equation}
165: \label{jeq}
166: \frac{d j_{\zeta e}}{d \zeta} =\alpha j_{\zeta e},
167: \end{equation}
168: where $\alpha$ is Townsend's 1st ionization coefficient (Llewellyn-Jones 1966),
169:
170: \begin{equation}
171: \label{alpha}
172: \alpha =AP \exp (-C(P/|E_\zeta | )^s)
173: \end{equation}
174: where $A$ and $C$ are constants depending on the gas, $P$ is the gas pressure and $s=1/2$ for a
175: monatomic gas. Since
176: $\zeta =x/\cos\theta$, $j_{\zeta e}=j_e /\cos\theta$ and $E_\zeta =E\cos\theta$,
177: \ref{jeq} becomes
178:
179: \begin{equation}
180: \label{current}
181: \frac{d j_e}{d x} = \alpha ' j_e =\frac{AP}{\cos\theta} \exp \left( -C(P/|E|\cos\theta )
182: ^{1/2}\right) j_e.
183: \end{equation}
184: The only difference in equation (\ref{current}) to the unmagnetized case is therefore the replacement of
185: the pressure $P$ by the ``effective pressure" $P/\cos\theta$.
186:
187: The ion mobility is assumed unaffected by the magnetic field, so we assume,
188: as do Davies and Evans (1980), that
189: \begin{equation}
190: |v_i| = k (|E|/P)^{1/2}
191: \end{equation}
192: where $k$ is a constant. This gives a good representation of the experimental
193: ion drift (Ward 1962). However we note that this means that the ion
194: and electron drift velocities have different $E$ dependences, so $r$ is not
195: strictly independent of $E$ as we have assumed so far. A dependence
196: of $r$ on $E$ would prevent the application of the analysis used here, so
197: we neglect it, noting that it could cause an error in our results at high
198: magnetic fields.
199:
200: The charge of a (negatively charged) dust particle
201: is determined by the current balance equation
202: \begin{equation}
203: \label{char}
204: \sqrt{\pi/8}n_i(z)\bar{v}_i(z)\left[1-
205: \frac{2eQ_d(z)}{am_i\bar{v}_i^2(z)}\right]
206: =n_0v_{e}\exp\left[
207: \frac{eQ_d(z)}{aT_e}+\frac{e\varphi(z)}{T_e}\right].
208: \end{equation}
209:
210: \section{Results}
211:
212: The equations have been solved for a number of cases, using the above
213: prescription, to illustrate the
214: effect on the discharge of increasing the magnetic field and the density of dust particles.
215: The parameters used in the numerical examples are those
216: of van der Straaten et al (1994), viz. $d=2.2$cm, $P=5$mTorr and 50mTorr, and Argon
217: gas, for which $A=29.22{\rm cm}^{-1}{\rm Torr}^{-1}$, $C=26.6{\rm V}
218: ^{1/2}{\rm cm}^{-1/2}{\rm Torr}^{-1/2}$, electron mobility for zero magnetic field $\mu_e=3\times 10^5{\rm cm}^2 {\rm %%@
219: Torr V s}^{-1}$ and $k=8.25\times 10^3
220: {\rm cm}^{3/2}{\rm Torr}^{1/2}{\rm V}^{-1/2}{\rm s}^{-1}$.
221: The corresponding electron collision frequency is
222: $\nu = 6\times 10^9 P{\rm s}^{-1}$ where $P$ is in Torr. The ratio
223: of ion and electron mobilities in the unmagnetized gas is $r_0 =3.3\times
224: 10^{-3}$ (Ward 1962).
225:
226: Figure 2 shows the electric field, ion velocity and space charge
227: profiles for a pressure of 5mTorr. The cathode is at $x=0$ and the anode is at $x=2.2$cm. No magnetic field and no %%@
228: dust is present, and the potential drop = 209V. There is the usual positive space charge region near the cathode.
229:
230: \begin{figure}
231: \includegraphics[width=7cm]{Fig2.eps}
232: \caption{The electric field, ion velocity and space charge
233: profiles for a pressure of 5mTorr. There is no magnetic field or dust.}
234: \end{figure}
235:
236: Figure 3 shows the electric field, ion velocity and space charge
237: profiles. No magnetic field is present, but dust is present, with $n_{d0}=10^3$, and the potential drop = 209V. A %%@
238: negative space charge region forms near the anode, due to the dust.
239:
240:
241: \begin{figure}
242: \includegraphics[width=7cm]{Fig3.eps}
243: \caption{The electric field, ion velocity, space charge and dust particle charge
244: profiles. There is no magnetic field, but $n_{d0}=10^3$.}
245: \end{figure}
246:
247: Figure 4 shows the electric field, ion velocity and space charge
248: profiles. No magnetic field is present, but dust is present with a higher density, with $n_{d0}=3\times 10^3$, and the %%@
249: potential drop = 209V. The negative space charge region is more pronounced.
250:
251:
252: \begin{figure}
253: \includegraphics[width=7cm]{Fig4.eps}
254: \caption{There is no magnetic field, but $n_{d0}=3\times 10^3$.}
255: \end{figure}
256:
257: In figure 5 a magnetic field is present, with $\cos\theta =0.2$, but no dust is present, and the potential drop = %%@
258: 392V. The negative space charge region is now due to the magnetic field.
259:
260: \begin{figure}
261: \includegraphics[width=7cm]{Fig5.eps}
262: \caption{A magnetic field is present, with $\cos\theta =0.2$, but no dust is present.}
263: \end{figure}
264:
265: In figure 6 a magnetic field is present, with $\cos\theta =0.2$, and dust is present with $n_{d0}=10^3$, and the %%@
266: potential drop = 392V. The negative space charge region is more prominent, due to the dust.
267: Dust charges negative near the NSC.
268:
269: \begin{figure}
270: \includegraphics[width=7cm]{Fig6.eps}
271: \caption{A magnetic field is present, with $\cos\theta =0.2$, and $n_{d0}=10^3$.}
272: \end{figure}
273:
274: \newpage
275:
276:
277:
278: In figure 7 a stronger magnetic field is present, with $\cos\theta =0.5$, and dust is present with $n_{d0}=10^3$, and %%@
279: the potential drop = 524V. The negative space charge region is wide.
280: Dust charges positive over most of the discharge.
281:
282:
283:
284:
285:
286: \section{Discussion and Conclusions}
287:
288: A numerical solution of the electron, ion and dust fluid transport
289: equations for a magnetized discharge has been developed, building on
290: previous work for an unmagnetized steady-state glow discharge. Understanding
291: the transport of charged particles across the magnetic field is important
292: for modelling the operation of magnetron devices used in plasma processing
293: for industry. The effects of charge on the dust particles on the transition
294: from a positive space charge mode to a negative space charge mode as the
295: magnetic field is increased or the pressure is reduced has
296: been demonstrated.
297:
298: The presence of dust can create a negative space charge region near the anode, which enhances or mimics the effect of %%@
299: a magnetic field. If however the field is so strong that the ions are magnetized (future work), the dust grains may %%@
300: carry most of the current, which will enhance the positive space charge region.
301:
302:
303: \section{Acknowledgements}
304: The work was supported by the Australian Research Council.
305:
306: \newpage
307:
308: \section*{References}
309:
310: \noindent
311: Cramer N F 1997 {\it J. Phys. D: Applied Physics}, {\bf 30}, 2573-2584
312:
313: \noindent
314: Davies A J and Evans J G 1980 {\it J. Phys. D: Applied Physics} {\bf 13} L161
315:
316: \noindent
317: Gu L and Lieberman M A 1988 {\it J. Vac Sci. Technol.} A{\bf 6} 2960
318:
319: \noindent
320: Hayakawa S and Wasa K 1965 {\it J. Phys. Soc. Japan} {\bf 20} 1692
321:
322: \noindent
323: Llewellyn-Jones F 1966 {\it The Glow Discharge} (London: Methuen)
324:
325: \noindent
326: Neuringer J L 1978 {J. Applied Phys.} {\bf 49} 590
327:
328: \noindent
329: Rossnagel S M and Kaufman H R 1986 {\it J. Vac Sci. Technol.} A{\bf 4} 1822
330:
331: \noindent
332: Sheridan T E and Goree J 1989 {\it J. Vac Sci. Technol.} A{\bf 7} 1014
333:
334: \noindent
335: Simon A 1963 {\it Phys. Fluids} {\bf 6} 382
336:
337: \noindent
338: Thornton J A and Penfold A S 1978 {\it Thin Film Processes}
339: (New York: Academic Press), eds. J L Vossen and W Kern.
340:
341: \noindent
342: van der Straaten T A and Cramer N F 1997 {\it Phys. Plasmas}, {\bf 7}, 391--402 (2000).
343:
344: \noindent
345: van der Straaten T A, Cramer N F, Falconer I S and James B W 1994
346: 47th Gaseous Electronics Conference, Gaithersburg, Maryland, USA, Abstract
347: published 1994 {\it Bulletin of the American Physical Society} {\bf 39} 1467
348:
349: \noindent
350: van der Straaten T A, Cramer N F, Falconer I S and James B W 1997,
351: {\it J. Phys. D: Applied Physics}, {\bf 31}, 177-190 (1998).
352:
353: \noindent
354: Ward A 1962 {\it J. Applied Phys.} {\bf 33} 2789
355:
356: \noindent
357: Yeom G Y, Thornton J A and Kushner M J 1989 {\it J. Applied Phys.} {\bf 65} 3816
358: %\end{references}
359:
360: \begin{figure}
361: \includegraphics[width=7cm]{Fig7.eps}
362: \caption{A magnetic field is present, with $\cos\theta =0.5$, and dust is present with $n_{d0}=10^3$.}
363: \end{figure}
364:
365: \newpage
366: \end{document}
367:
368:
369: